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High-Purity Pressure Gauges and Switches

High-Purity Pressure Gauges, Switches and Transducers for Semiconductor Manufacturing
SCI
Available Models
  • Model 1535 High Purity Pressure Gauges
    Ametek Model 1535 pressure gauges are designed and manufactured for ultrahigh-purity gas distribution equipment used in semiconductor manufacturing. These 2 inch, all stainless steel gauges are clean room produced and feature welded VCR type face seal connections for a threadless pressure seal.

  • Model HPT100 High Purity Transducers
    The Ametek family of HPT100 of flow-through and single-ended pressure transducers are best in class quality and reliability designed specifically for challenging semiconductor manufacturing processes. Applications include gas delivery systems for process tools, cylinder pressure alarm and shut down control.

  • Model IPS200 High Purity Pressure Switch/Gauge
    The Ametek Model IPS200 switch gauge was specially designed for use with gas handling equipment in the semiconductor manufacturing industry. Specific applications include coaxial monitoring, low cylinder pressure alarm or high delivery pressure due to regulator drift. Class 100 clean room assembled. Available in a single setpoint version.

  • Model LPD High Purity Digital Meter/Loop Indicator
    The model LPD series loop indicator is a digital display designed to connect directly to the AMETEK HPT100 series transducer. Its purpose is to produce either a local or remote indication of the process in either pressure, current or percent of full scale along with optional alarm set points.

 
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